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鏡頭設備規(guī)格HF12.5SA-1
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電路板設備規(guī)格KLA 2367 SDB
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防震臺彈簧設備規(guī)格Floatation Springs Replacement
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氣路控制總成設備規(guī)格Pneumatic Subsystem，Comet
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主直流電源設備規(guī)格Main DC PowerSupply
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校準低倍鏡頭設備規(guī)格Low Mag， AMS Fru Kit， COMET
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12英寸NIST可追溯PSL校準晶片（D.155-4.99）設備規(guī)格KLA-Tencor PSL12 Inch NIST Traceable PSL Calibration Wafer (D .155 to 4.99) KLA-Tencor PSL
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12英寸NIST可追溯PSL校準晶片（D.126-.155）設備規(guī)格KLA-Tencor PSL 12 Inch NIST Traceable PSL Calibration Wafer (D .126 to .155)KLA-Tencor PSL
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電源設備規(guī)格LASER HEAD -5517B